Sensor for non-contacting electrostatic detector
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United States of America Patent
Stats
-
Jul 29, 2003
Grant Date -
Mar 6, 2003
app pub date -
Aug 24, 2001
filing date -
Aug 24, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. An amplifier and the sensitive electrode are combined in an assembly on the vibratory element thereby providing a low impedance amplifier output which in turn allows a narrow spacing around the vibratory element to prevent entry of contaminants. The vibratory element can be provided with a structure which allows measurements with various spatial resolution characteristics.
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