Method of preparing photosensitive resin composition
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United States of America Patent
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Jul 29, 2003
Grant Date -
Mar 28, 2002
app pub date -
Aug 30, 2001
filing date -
Oct 30, 1998
priority date (Note) -
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Abstract
A 6,6'-dialkyl-3,3',4,4'-biphenyltetracarboxylic dianhydride is prepared by brominating a 4-alkylphthalic anhydride at its 5-position, and coupling the bromination product in the presence of a nickel catalyst; A photosensitive resin composition containing a polyimide precursor having repetitive units of general formula (7) is applied onto a substrate, exposed to i-line, developed and heated to form a polyimide relief pattern. ##STR1## wherein Y is a divalent organic group, R.sup.7 and R.sup.8 are OH or a monovalent organic group, R.sup.9 and R.sup.10 are a monovalent hydrocarbon group, R.sup.11, R.sup.12 and R.sup.13 are a monovalent hydrocarbon group, a and b are an integer of 0 to 2, c is an integer of 0 to 4, and m is an integer of 0 to 3.
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