Capacitive vacuum sensor
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United States of America Patent
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Jul 29, 2003
Grant Date -
Jan 31, 2002
app pub date -
Mar 9, 2001
filing date -
Mar 10, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A capacitive vacuum sensor includes a non-conducting substrate, a plurality of fixed electrodes on the non-conducting substrate, and a diaphragm electrode formed by a plurality of elastic structures, each of the elastic structures being arranged to oppose a respective one of the fixed electrodes and having a different physical size (area) that is the same as that of each corresponding fixed electrode. More specifically, the areas of the elastic structures have a specific relationship between them, as defined by a specific ratio, and the areas may differ successively from each other according to the specific ratio. The capacitive vacuum sensor further includes compensation electrodes that are not sensitive to any change in the capacitance that may occur in response to any change in the pressure, but is only sensitive to any change in the capacitance that may occur in response to any change in the temperature. The elastic structures forming the diaphragm electrode have a plurality of projections on the surfaces to detach the elastic structures, which have been pressed against by the corresponding fixed electrodes under the higher pressure, away from the corresponding fixed electrodes when the pressure becomes lower.
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