Thin film product and method of forming

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United States of America Patent

PATENT NO 6596377
SERIAL NO

09535732

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Abstract

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A new and useful technique for growing an epilayer onto a substrate is provided. An epilayer is grown on a substrate by (a) providing a patterned substrate comprising a plurality of isolated nanoscale nucleation sites, and (b) growing an epilayer selectively on the nanoscale nucleation sites, in a manner which localizes strain at the substrate-epilayer interface, and enables strain to reduce as the thickness of the epilayer increases.

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Patent Owner(s)

Patent OwnerAddress
SCIENCE & TECHNOLOGY CORPORATION AT THE UNIVERSITY OF NEW MEXICO801 UNIVERSITY BLVD SE SUITE 101 ALBUQUERQUE NM 87106

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brueck, Steven R J Albuquerque, NM 103 1830
Hersee, Stephen D Albuquerque, NM 38 1090
Zaidi, Saleem H Albuquerque, NM 12 1182
Zubia, David Albuquerque, NM 7 60

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