Slurry pump control system
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United States of America Patent
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-
Jul 22, 2003
Issued Date -
N/A
app pub date -
Feb 5, 2001
filing date -
Feb 9, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A CMP slurry pumping system and method which uses the slurry pump inlet pressure as input to the pump controller, and the controller adjusts pump speed to account for variations in inlet pressure.
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