High resolution optical stepper
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 15, 2003
Issued Date -
N/A
app pub date -
Oct 13, 2000
filing date -
Jun 19, 1998
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Abstract
A stepper for imaging integrated circuit and flat panel displays uses a thermoresist instead of photoresist and separates the mask into multiple masks, each one containing only part of the features which need to be imaged. The fmal image is generated by combining the images from all the masks on a single die taking advantage of the fact that thermal resists do not follow the reciprocity law. For maximum resolution each one of the multiple masks contains features of only one size.
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