High resolution optical stepper
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 8, 2003
Issued Date -
N/A
app pub date -
Mar 1, 2001
filing date -
Jun 19, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A stepper for imaging integrated circuit and flat panel displays uses a thermoresist instead of photoresist and separates the mask into multiple masks, each one containing only part of the features which need to be imaged. The final image is generated by combining the images from all the masks on a single die taking advantage of the fact that thermal resists do not follow the reciprocity law. For maximum resolution each one of the multiple masks contains features of only one size.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully