MEMS microactuators located in interior regions of frames having openings therein and methods of operating same
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United States of America Patent
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Jul 8, 2003
Issued Date -
N/A
app pub date -
Sep 26, 2001
filing date -
Feb 26, 1999
priority date (Note) -
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Abstract
A MEMs microactuator can be positioned in an interior region of a frame having at least one opening therein, wherein the frame expands in response to a change in temperature of the frame. A load outside the frame can be coupled to the microactuator through the at least one opening. The microactuator moves relative to the frame in response to the change in temperature to remain substantially stationary relative to the substrate. Other MEMs structures, such as latches that can engage and hold the load in position, can be located outside the frame. Accordingly, in comparison to some conventional structures, temperature compensated microactuators according to the present invention can be made more compact by having the interior region of the frame free of other MEMs structures such as latches.
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