Method for fabricating three dimensional traveling wave tube circuit elements using laser lithography

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6584675
SERIAL NO

09591697

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for constructing thermally and dimensionally stable traveling wave tube circuits having high dimensional stability, narrow tolerances, and very small size by providing a small hollow preform constructed of a desired material which is coated with a layer of photoresist material then exposed to a UV laser to form a desired pattern mask in the photoresist layer. The pattern masked preform is then etched to create a preform having a desired shape. After shaping, the photoresist coating is stripped from said shaped preform to form a traveling wave tube circuit. Optionally the travel wave tube circuit may be polished. Additionally, the present invention contemplates an apparatus for forming small three dimensional circuit structures from preforms comprising a chuck for supporting the preform on its axis, a motor for rotating the preform, a UV laser for directing a beam onto the preform, a means for shifting the laser along said preform, and a controller for controlling the motors rate of rotation, the rate of movement along the length of the preform caused by shifting means, and whether the laser is on or off to achieve a predetermined pattern mask on the preform. Additionally, the present invention contemplates novel three dimensional structures including a very small helical traveling wave tube circuit, a ringed bar circuit structure, a finned ladder circuit structure, and a slotted finned ladder circuit structure as well as traveling wave tubes incorporating these structures.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
L-3 COMMUNICATIONS ELECTRON TECHNOLOGIES INC3100 W LOMITA BLVD TORRANCE CA 90509

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dayton, Jr James A 1718 Esplanade #203, Redondo Beach, CA 90277 5 39
Rajan, Sunder S 6433 E. Look Out Lane, Anaheim, CA 92807 14 40

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation