Tunable Fabry-Perot filter and tunable vertical cavity surface emitting laser

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United States of America Patent

PATENT NO 6584126
APP PUB NO 20030091072A1
SERIAL NO

09750434

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Abstract

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A tunable Fabry-Perot filter and a tunable vertical cavity surface emitting laser (VCSEL) are disclosed, where both devices utilize an improved dome structure for creating an internal air gap.

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Patent Owner(s)

Patent OwnerAddress
CORETEK INC600 TECHNOLOGY PARK BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tayebati, Parviz Boston, MA 181 3284
Vakhshoori, Daryoosh Cambridge, MA 94 1728
Wang, Peidong Billerica, MA 67 986

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