Charge measuring device with wide dynamic range
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United States of America Patent
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Jun 24, 2003
Grant Date -
Apr 17, 2003
app pub date -
Oct 11, 2001
filing date -
Oct 11, 2001
priority date (Note) -
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Abstract
A fast dosimeter for ion implantation and other systems that produce charges or current to be measured. When a charge accumulator reaches a predetermined charge, a fixed charge is removed to reduce the accumulated charge. A counter records each charge removal. Between removals, an analog-to-digital converter measures the accumulator charge. The outputs from the counter and the analog-to-digital converter provide a continually updated value for the total accumulated charge, and by differentiation, current with respect to time.
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