Importance

Loading Importance Indicators...

Abstract

In one implementation, a method for operating a plurality of MEMS devices including applying a magnitude of a selected actuation signal equal to a first substantially constant magnitude to an actuator to cause a movable structure to begin to accelerate from a first position to impact a motion stop at a second position. The method also includes decreasing the magnitude of the selected actuation signal in a first manner. The method further includes varying at least one of a start time and a duration of the decreasing magnitude of the selected actuation signal and observing a settling time of the movable structure in response to the step of varying. In some implementations, the method includes ascertaining a range of values for the start times and the corresponding durations for each of the plurality of MEMS devices that are capable of providing settling times of the movable structure in conformance with a predetermined specification based on the steps of varying and observing. Such an implementation can include using the ascertained range of values for each device and the selected actuation signal for determining an operating start time and a corresponding operating duration to construct an operating actuation signal capable of providing a settling time for all devices in conformance with the predetermined specification. The method also can include controlling a signal source with a programmed processor to selectively apply the operating actuation signal to the plurality of MEMS devices.

Loading the Abstract Image...

First Claim