Exposure device
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United States of America Patent
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May 20, 2003
Grant Date -
N/A
app pub date -
Jun 29, 2001
filing date -
Dec 11, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
An exposure device with a lamp, a condenser arrangement (2), a light modulator, a field lens and a projection objective (5), characterised in that the light modulator consists of a reflecting micro-mirror arrangement (3) in front of which the field lens (4) is arranged in a manner such that the beam path runs through the field lens (4) onto the micro-mirror arrangement (3) and after modulation and reflection at acute angles (16) once again runs through the field lens (4).
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