Plasma focus light source with tandem ellipsoidal mirror units
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United States of America Patent
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May 20, 2003
Issued Date -
N/A
app pub date -
Jun 6, 2001
filing date -
May 12, 1997
priority date (Note) -
In Force
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Abstract
A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 .pi. steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.

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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ASML NETHERLANDS B V | P O BOX 324 VELDHOVEN 5500 AH |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Birx, Daniel L | late of Potomac, MD | 27 | 1626 |
Fomenkov, Igor V | San Diego, CA | 156 | 5670 |
Melnychuk, Stephan T | Carlsbad, CA | 7 | 424 |
Ness, Richard M | San Diego, CA | 52 | 2513 |
Partlo, William N | Poway, CA | 183 | 6942 |
Rauch, John E | Poway, CA | 3 | 156 |
Sandstrom, Richard L | Encinitas, CA | 136 | 5606 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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