Piezo-resistive thermal detection apparatus
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United States of America Patent
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May 20, 2003
Grant Date -
Sep 19, 2002
app pub date -
Mar 15, 2002
filing date -
Mar 15, 2001
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Abstract
A piezo-resistive thermal detection apparatus for detecting the temperature of fluid inside a cavity device, such as the temperature of ink inside an inkjet print head. The apparatus includes a detection region and a plurality of piezo-resistive devices. The detection region is disposed on the inkjet print head in the form of a rectangle and made of a semiconductor material. The piezo-resistive devices are disposed on centers of each side of the detection region, wherein stresses produced by deformation of the piezo-resistive devices are exerted on the piezo-resistive devices. When the temperature of the ink rises, the surface of the inkjet print head is heated and expands, resulting in the deformation of the thermal detection apparatus. The piezo-resistive devices experience large amounts of stress due to the deformation of the thermal detection apparatus and thus the resistances of the piezo-resistive devices change. The piezo-resistive devices are connected together in the form of a circuit bridge so that a voltage signal indicative of the changes in their resistances can be outputted. According to the voltage signal outputted, the temperature of the ink is obtained.
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