Diamond-like carbon hard multilayer film and component excellent in wear resistance and sliding performance
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United States of America Patent
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May 13, 2003
Grant Date -
Oct 18, 2001
app pub date -
Mar 21, 2001
filing date -
Mar 23, 2000
priority date (Note) -
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Abstract
A coating film and a coated machine component that have an excellent wear resistance, a low friction coefficient, and an excellent sliding performance are provided. A coating film of the present invention is a DLC hard multilayer film 3 which has a low hardness hard carbon layer 4 containing a graphite cluster having a mean size of 2 nm or more, and a high hardness hard carbon layer 5 containing a graphite cluster having a mean size of 1 nm or less, the low hardness carbon layer 4 and the high hardness carbon layer 5 being amorphous structures each containing carbon as a main component, and being alternately laminated. The graphite cluster in the low hardness hard carbon layer 4 preferably has a shell structure in which the C-planes of graphite are laminated in the form of spherical nuclei. Further, it is preferable that the outermost layer A is formed of the low hardness hard carbon layer, and the layer thickness thereof is set at from 2 nm to 200 nm. Still further, a component of the present invention is formed by laminating the DLC hard multilayer film 3 on a substrate 1 with an intermediate layer 2 interposed therebetween.
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