Method and device for calibrating measurements of temperatures independent of emissivity

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United States of America Patent

PATENT NO 6561694
SERIAL NO

09744880

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Abstract

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A method and apparatus for calibrating temperature measurements that are taken with a first radiation detector for measuring thermal radiation given off by a reference substrate are provided. The method includes the steps of heating the reference substrate, which carries at least one reference material having a known melting point temperature, to or over the melting point temperature and measuring the thermal radiation of the reference substrate during the heating step, during a cooling period that follows the heating, or during both the heating and the cooling periods. The method also includes the step of correlating a measurement plateau of the thermal radiation which occurs during the measuring step with the known melting point temperature.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEJING 100176

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hauf, Markus Ichenhausen, DE 64 652
Lerch, Wilfried Dornstadt, DE 20 161

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