Method and apparatus for a non-contact scavenging seal

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6559922
APP PUB NO 20010038442A1
SERIAL NO

09846386

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method and apparatus for providing a purged optical path between an optical source surface and an optical target surface and for permitting relative movement between the optical source surface and the optical target surface is described. The apparatus includes a body, a central cavity, at least one gas supply bore, and at least one gas removal bore. The body defines first and second opposing surfaces. The first opposing surface is configured for positioning closely adjacent to the optical target surface. The second opposing surface is configured to mate with the optical source surface. The central cavity is formed in the body for passing light through the body, the central cavity being open at the first and second opposing surfaces. The at least one gas supply bore is formed in the body for suppling a flow of a purge gas to the central cavity. The at least one gas removal bore is formed in the body at the first opposing surface to remove gas from a gap formed between the first opposing surface and the optical target surface.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VP O BOX 324 VELDHOVEN 5500 AH
ASML US INC8555 SOUTH RIVER PARKWAY TEMPE AS 85284
ASML US LLC1209 ORANGE STREET WILMINGTON DE 19801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hansell, Eric C 4 Cambridge Cir., New Milford, CT 06776 1 42
Herrera, Jose V 416 Knowlton St., Stratford, CT 06615 1 42
Huse, Richard L 6 Devon Ave., Norwalk, CT 06850 3 80
Ivaldi, Jorge S 2060 Huntington Turnpike, Trumbull, CT 06611 7 163
Krehley, Stephen G 40 Tashua La., Trumbull, CT 06611 1 42
Shamaly, Thomas P 19 Spoke Dr., Shelton, CT 06484 3 88

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