Plasma vacuum pump
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United States of America Patent
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-
May 6, 2003
Grant Date -
N/A
app pub date -
Jul 2, 2001
filing date -
Dec 30, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.
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