Method of separating two layers of material from one another and electronic components produced using this process
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United States of America Patent
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May 6, 2003
Issued Date -
N/A
app pub date -
Apr 1, 1999
filing date -
Oct 1, 1996
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of separating two layers of material from one another in such a way that the two separated layers of material are essentially fully preserved. An interface between the two layers of material at which the layers of material are to be separated, or a region in the vicinity of the interface, is exposed to electromagnetic radiation through one of the two layers of material. The electromagnetic radiation is absorbed at the interface or in the region in the vicinity of the interface and the absorbed radiation energy induces a decomposition of material at the interface.
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Cited Art Landscape
Patent Citation Ranking
- 220 Citation Count
- H01L Class
- 97.17 % this patent is cited more than
- 22 Age