Electronic damping of MEMS devices using a look-up table
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United States of America Patent
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Apr 29, 2003
Issued Date -
N/A
app pub date -
Jun 30, 2001
filing date -
Feb 13, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In one embodiment, a MEMS apparatus having a MEMS array including a plurality of MEMS devices is provided. In some embodiments, each of the plurality of MEMS devices includes a movable structure and a second structure. In addition, in some embodiments, a plurality of signal sources are coupled to the plurality of MEMS devices so as to be capable of supplying actuation signals for actuating the movable structure to impact the second structure. Further, in some embodiments, at least one processor is coupled to the plurality of signal sources to control the actuation signals, and is configured such that each of the plurality of MEMS devices is provided with a corresponding custom actuation signal.
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