Stable metal-safe stripper for removing cured negative-tone novolak and acrylic photoresists and post-etch residue
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United States of America Patent
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Apr 22, 2003
Grant Date -
N/A
app pub date -
Oct 9, 2001
filing date -
Oct 9, 2001
priority date (Note) -
Expired
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Abstract
A stripping composition is provided for removing polymeric organic substances from an inorganic substrate. The stripping composition comprises about 3 to about 15 weight percent aromatic quaternary ammonium hydroxide, preferably benzyltrimethylammonium hydroxide (BTMAH), about 50 to about 87.5 weight percent alkylsulfoxide, a co-solvent preferably a glycol, and, desirably, a suitable corrosion inhibitor and a non-ionic surfactant. Also provided is a method for stripping polymeric organic substances (i.e., negative-tone novolak and acrylic photoresists and post-etch residue) from inorganic substrates by contacting the polymeric organic substance with the organic stripping the BTMAH composition for a period of time sufficient to remove said polymeric substances.
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