Micro-machined mechanical structure and device incorporating the structure
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United States of America Patent
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Apr 15, 2003
Grant Date -
Jan 31, 2002
app pub date -
Apr 23, 2001
filing date -
Apr 28, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A mechanical structure (100) comprises a moving mass (3) suspended by beams (4, 5, 6, 7) from a fixed frame (2). The structure (100) comprises elongation means (23-26) mechanically connected to each of the beams (4, 5, 6, 7). The elongation means is designed such that the stiffness of the beams (4, 5, 6, 7) varies only little during movement of the moving mass. The structure is characterized in that the response of an elongation means is asymmetric when acting in tension and in compression. The structure is thus made insensitive to accelerations along a direction parallel to the suspension direction.
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