Method and apparatus for measuring thickness of transparent films
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United States of America Patent
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Apr 8, 2003
Grant Date -
N/A
app pub date -
Nov 8, 2000
filing date -
Nov 8, 1999
priority date (Note) -
Expired
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Abstract
A method and an apparatus for measuring thickness of transparent films is described in which an illumination beam is directed through an objective onto an object comprising a transparent film. A structured focusing aid is disposed in the illumination beam, a camera is disposed in an imaging beam. The focusing aid and the camera each are disposed in locations conjugated with the focal plane of the objective. The focal plane of the objective is displaced stepwise through the object. At each position, a camera image is recorded and its focus score is determined, the image of the focusing aid being used as the contrast indicator. The positions with maximal focus scores are assigned to the locations of the interfaces. The thickness of the transparent film is calculated from the difference between the positions of its interfaces.
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