Non-contact topographical analysis apparatus and method thereof
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United States of America Patent
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Apr 8, 2003
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N/A
app pub date -
Jul 20, 2001
filing date -
Nov 13, 1998
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Abstract
Topographic analysis apparatus consists of a light source (1) and associated optics (2) for illuminating a mirrored surface O with a parallel light beam. Light reflected from the mirrored surface is collected by a camera (4) that is mounted on a moveable carriage (5) so that images of the mirrored surface O may be recorded at a plurality of different distances from the surface. The Makyoh topograms produced using this apparatus are then analyzed using phase extraction software to iteratively determine the profile of the surface of the object and the object's reflectivity. In this way Makyoh topograms may be used for quantitative as well as qualitative analysis of a reflective surface such as a semiconductor wafer.
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