Two-sided substrate imaging using single-approach projection optics
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United States of America Patent
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Apr 8, 2003
Issued Date -
N/A
app pub date -
Jun 12, 2001
filing date -
Mar 8, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus and method for side-by-side scanning of substrate panels to use a single-approach projection optical system to provide a patterned image on each of two substrate surfaces. More particularly, the system provides a technique for pattern scanning obverse and reverse surfaces, patterning one substrate surface, inverting the substrate panel and repositioning the substrate panel for patterning the opposite substrate surface. The inversion provides access to both surfaces of a substrate panel for pattern scanning by the same optics and the same precision x-y stage in quick succession. The system positions the same substrate panel inverted, or another substrate panel, as required, twice at one station or sequentially at first and second stations. The flipping mechanism may be a simple grabber/retractor with a rotatable wrist for substrate inverting; the stage selects the imaging station. Forwarders may be Inexpensive standard pick-and-place, slide-shuttle or carousel loader/unloader mechanisms.
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