Teaching tool for a robot arm for wafer reaction ovens
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 8, 2003
Grant Date -
Jun 20, 2002
app pub date -
May 24, 2001
filing date -
Dec 15, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A teaching tool for a robot arm for wafer reaction ovens is provided to anchor the robot arm with respect to a tray located inside a reaction oven. The teaching tool provides an upper flange for maintaining a spacing between a handle of the robot arm and a door of the oven, a position width for keeping the teaching tool aligning with a center line of the tray, and a lower tunnel aligning with the center line for allowing a blade of the robot arm to contact closely and horizontally from a lower position and thus for maintaining a position height between the blade and a floor of the reaction oven. By providing the teaching tool, easy blind calibration with multiple contact points between the robot arm and the oven can be performed so that possible efficiency down and cost up from an ill-calibration can be reduced to a minimum.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully