Linear motion leadthrough
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United States of America Patent
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Apr 8, 2003
Grant Date -
Apr 3, 2003
app pub date -
Oct 3, 2001
filing date -
Oct 3, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A linear motion leadthrough for a rod which has a first end, a second end and an outer surface and whose first end projects into a vacuum area of a vacuum installation while its second end is located outside of the vacuum area, comprises: a bushing which has an inner wall and through which the rod extends and which is displaceable linearly relative to the rod, at least one elastomer sealing ring for sealing the rod relative to the bushing which is secured to the inner wall of the bushing or to the outer surface of the rod, wherein the sealing ring is lubricated by a lubricant, and a bellows which is arranged inside the vacuum area, has a first end and a second end, encloses a portion of the rod located inside the vacuum area and delimits a space located between the rod and the bellows from a space lying outside the bellows, and whose first end is fastened to the rod and whose second end is fastened to the bushing or to a part enclosing the bushing, wherein at least one opening is provided which connects the space between the rod and the bellows with the space outside the bellows.
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