Unit for inspecting a surface
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United States of America Patent
Stats
-
Mar 25, 2003
Grant Date -
Oct 11, 2001
app pub date -
Dec 22, 2000
filing date -
Apr 10, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The unit for inspecting a surface is to detect a flaw on a specular surface of an object to be inspected with accuracy. The unit is so arranged that light 1a is irradiated from a point light source or close to a point light source 4, the light 1a is refracted by a Fresnel lens 5 so as to converge in a condition of being close to parallel, the refracted light 1a is reflected by a half mirror 6, the light 1a is irradiated on generally whole area of the specular surface 2 to be inspected and the reflected light 1a is introduced into an image capturing means 10 provided at a position where the light 1a converges.
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