Defect integrated processing apparatus and method thereof
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United States of America Patent
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Mar 18, 2003
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N/A
app pub date -
Apr 5, 1999
filing date -
Jul 21, 1998
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Abstract
A defect integrated processing apparatus and method for performing a processing in an integrated fashion of various kinds of edfect and then detecting the accurate number, positions, sizes, etc. of the defects in detail, includes detecting light-and-shade defects based on an image data obtained by picking up an object to be inspected. Edges and minute defect on the object are detected by performing a differential processing of the image data, low contrast light-and-shade defects are detected by performing an integral processing of the image data obtained through the image pick-up device and then a differential processing of an obtained integrated image, and an integrated information of defects is obtained by performing a processing in an integrated fashion of detected defects.
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