Vacuum treatment system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 4, 2003
Issued Date -
N/A
app pub date -
Jun 5, 2000
filing date -
Dec 23, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vacuum treatment system in which a part (9) is provided inside a vacuum treatment chamber (1). A potential (.phi..sub.9) which deviates from the system reference potential (.phi..sub.0) by approximately at least .+-.12 V is applied to said part. A sensor and/or an actuator (11) is/are arranged on said part. In addition, the invention comprises an electronic unit (13) which is connected to the sensor and/or actuator. Processing signals on the unit (13) is considerably simplified in that the electronic unit (13) is operated as a reference potential on the potential (.phi..sub.9) of said part (9).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully