Micromachined optomechanical switches

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United States of America Patent

PATENT NO 6526198
SERIAL NO

10053399

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Abstract

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In at least one embodiment, a MEMS optomechanical switch in accordance with the present invention includes a substrate, a signal source capable of transmitting a radiation signal, an electrode coupled to the substrate, and a micromachined plate rotatably coupled to the substrate about a pivot axis. The switch further includes a micromirror having an orientated reflective surface, mounted to the micromachined plate and an electrical source coupled to at least one of the electrode and the micromachined plate.

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Patent Owner(s)

Patent OwnerAddress
CROSSFIBER INC10455 PACIFIC CENTER CT SAN DIEGO CA 92121

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fan, Li Rowland Heights, CA 199 1647
Husain, Anis San Diego, CA 35 764
Wu, Ming C Pacific Palisades, CA 32 935

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