Rayleigh scattering optical flux monitor
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United States of America Patent
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Feb 25, 2003
Grant Date -
N/A
app pub date -
Dec 30, 1999
filing date -
Dec 30, 1999
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Expired
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Abstract
A device for in situ real time monitoring of atomic and molecular fluxes by use Rayleigh scattering. The flux can be generated by an effusion cell during molecular beam epitaxy. The present device uses a coherent light source, such as a helium neon laser, a high precision mirror assembly capable of providing an effective number of reflections though the flux beam and an interferometer detector to track the changes in flux.
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