Electrostatic actuator driving method and mechanism, using rigidity retention as a parameter
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United States of America Patent
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Feb 25, 2003
Grant Date -
N/A
app pub date -
Jun 12, 2000
filing date -
Jun 14, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a method of driving an electrostatic actuator which has a stator having driving electrodes in plural phases and a traveler moved along the stator by application of a driving voltage to the driving electrodes, the driving voltage applied to the driving electrodes is decided according to a voltage function employing as arguments a relative movement position of the traveler and/or a retention rigidity with which the traveler is retained at a standing position on the stator. An electrostatic actuator mechanism comprises a stator having driving electrodes in plural phases, a traveler relatively moved along the stator, a voltage applying means for applying a driving voltage to the driving electrodes, and a voltage function means for deciding the driving voltage applied to the driving electrodes according to a voltage function employing as argument a relative movement position of the traveler and/or a retention rigidity with which the traveler is retained at the standing position on the stator.
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