Process for the electroless deposition of metal on a substrate
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United States of America Patent
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Feb 25, 2003
Grant Date -
N/A
app pub date -
Oct 18, 1994
filing date -
Oct 18, 1994
priority date (Note) -
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Abstract
A process for the metalization of substrates is disclosed. The metal either forms a coating over the entire substrate, or it is patternwise deposited on the substrate surface. Metal is patternwise formed on the substrate either by forming a pattern of resist material on the substrate and depositing the material in the interstices defined by the pattern or by forming a patterned resist layer over a metal layer and transferring the pattern into the substrate using conventional techniques. The patterned resist layer is formed on the substrate using conventional techniques. The substrate is treated with reagents that promote the electroless plating of metal on the substrate surface. If the resist material has been previously formed on the substrate surface, the substrate surface is then dried. The remaining resist is then removed from the substrate surface. The substrate surface is then exposed to an electroless plating bath to form nickel onto those portions of the substrate surface that were treated with the sensitizing and activating solutions. The substrate is then heated to at least 180.degree. C. Additional layers of metal are formed on the substrate. After the additional layers are so formed, the substrate is again heated to a temperature of at least about 180.degree. C. after each layer is so formed.

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Patent Owner(s)
Patent Owner | Address | |
---|---|---|
BELL SEMICONDUCTOR LLC | ONE WEST BROAD STREET SUITE 901 BETHLEHEM PA 18018 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Evans, Michael D | Wilmington, MA | 11 | 341 |
Kim, Tae Yong | Boxford, MA | 86 | 822 |
Law, Henry Hon | Berkeley Heights, NJ | 8 | 293 |
Wu, Te-Sung | New Providence, NJ | 9 | 314 |
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Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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