Facility for treating objects in a process tank

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6523552
APP PUB NO 20010008142A1
SERIAL NO

09068618

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A processing tank has at least one fluid distribution device for introducing a treatment fluid. The fluid distribution device has at least one porous hollow rod, at least one porous plate, at least one capillary plate, or at least one single-ply or multi-ply fabric.

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Patent Owner(s)

  • AKRION SYSTEMS LLC;STEAG MICROTECH GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pokorny, Joachim Hufingen, DE 5 27

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