Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same
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United States of America Patent
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Feb 18, 2003
Grant Date -
Oct 31, 2002
app pub date -
Apr 26, 2001
filing date -
Apr 26, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Mounting systems for micro-electromechanical system (MEMS) structures are provided including a non-Newtonian fluid having a threshold viscosity that is positioned between a MEMS base member and the MEMS structure so as to position the MEMS structure relative to the base member. A MEMS actuator is coupled to the MEMS structure. The MEMS actuator is positioned to cause movement of the MEMS structure relative to the MEMS base member by generating a force sufficient to exceed the threshold viscosity of the non-Newtonian fluid when the MEMS actuator is actuated. The MEMS structure may be a MEMS mirror positioned for pivotal movement about a bearing member to control tilt of the MEMS mirror.
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