Process for determining spacing between heater and showerhead
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United States of America Patent
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-
Feb 11, 2003
Grant Date -
N/A
app pub date -
Nov 15, 2000
filing date -
Nov 15, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides a process for determining the spacing between a heater and a showerhead. First, at least one variable capacitor is placed between the heater and the showerhead, such that the spacing between the heater and the showerhead is in a predetermined relationship to the capacitance of the variable capacitor. Then, the capacitance of the variable capacitor is measured, and the spacing between the heater and the showerhead is converted from the capacitance. The determination process of the present invention can be conducted at high temperature above 350.degree. C., and the spacing can be determined without opening the deposition chamber. This makes the entire process very convenient and the cost can be saved.
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