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Abstract

The process for the manufacture of the rib waveguide (4) is based on the process steps (a) ion implantation of high-energy light ions into a crystal, (b) the application of a mask to the surface (11.1) of this crystal, which defines strips, and (c), the etching of a rib (41) onto the surface (11.1) of this crystal. The process step (a) (ion implantation) causes the formation of a layer (14) with a reduced refraction index at a depth of some micrometers below the surface of the crystal (11.1). By this refraction index barrier (14), the light in the direction vertical to the surface of the crystal is restricted. The lateral guidance of the light is effected by the lateral limits (43.1) and (43.2) of the rib (41). The process is in particular suitable for the manufacture of waveguides in non-linear optical crystals, e.g., ferro-electric oxides (KNbO3, LiNbO3, etc.) and borates (LBO, BBO, etc.). These crystal classes have interesting non-linear-optical characteristics and are suitable for utilization as frequency converters. The manufacturing process in accordance with the invention, in particular the combination of ion implantation and the etching of a rib structure, is adapted to the particular characteristics of the material and enables the manufacture of rib waveguides with a low attenuation, whereby the non-linear optical characteristics of the crystal are maintained. This is an important prerequisite for achieving an efficient frequency conversion.

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First Claim