Apparatus and method for pressing prober
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Feb 4, 2003
Grant Date -
N/A
app pub date -
Jan 10, 2000
filing date -
Jan 11, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus 10 for pressing a prober according to the present invention, which can press a prober 6 on an electrode-forming portion 4 of an inspection substrate 3 at a sufficient pressure by pivoting four split pressure heads 13 separately by a cylinder 16, and ensure an intimate contact between the prober 6 and the elestrode-forming portion 4 of the inspection substrate 3.
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