Holding device
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United States of America Patent
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Jan 28, 2003
Grant Date -
N/A
app pub date -
Aug 24, 2000
filing date -
Dec 23, 1997
priority date (Note) -
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Abstract
A holding device for a vacuum unit has a lifting table transferable between a lower end position and an upper end position for moving a support plate toward the underside of a disc-shaped workpiece. The workpiece is supported by a support ring carrying centring pins spaced to form an equilateral triangle, in the center of which the axis of the support plate is located. A clamping ring clamps the workpiece with the support ring. The centring pins engage the clamping ring to center the support ring and clamping ring relative to the support plate axis so they are not affected by thermal expansion.
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