Optical system for detecting surface defect and surface defect tester using the same
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United States of America Patent
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-
Jan 21, 2003
Grant Date -
Jun 27, 2002
app pub date -
Jul 19, 2001
filing date -
Dec 27, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A defect detection optical system includes a light receiving system including n light receiving elements arranged in a direction perpendicular to a main scan direction, for focusing an image thereon such that the image becomes in the arranging direction of the light receiving elements, in which, when a width of the image focused thereon in the main scan direction is equal to or smaller than the width of the light receiving elements, light reflected from a recessed or protruded defect is swung in the width direction of the light receiving elements and a light receiving area of the light receiving elements is reduced. When the reflection light from the recessed or protruded defect is; swung in sloped portions of the defect, an amount of light received by the light receiving elements is at least reduced, so that two detection signals having levels lower than those when there is no defect are obtained.
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