Apparatus for depositing a material by evaporation on large surface substrates
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United States of America Patent
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Jan 21, 2003
Grant Date -
N/A
app pub date -
Oct 21, 1997
filing date -
Apr 24, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for depositing a material by evaporation on a substrate having a large surface. The apparatus includes an enclosure in which are placed a number of material evaporation sources. It also includes a device for channeling or piping of vapors emitted by the sources toward the substrate during evaporation. This is formed by walls or covers which define compartments within the enclosure, each evaporation source being placed in a compartment. The apparatus can also utilize a device for moving the substrate in order to improve the uniformity of the deposit.
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