Chemiluminescence detection apparatus
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United States of America Patent
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Jan 14, 2003
Grant Date -
Jul 12, 2001
app pub date -
Aug 4, 1998
filing date -
May 6, 1998
priority date (Note) -
Expired
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Abstract
An apparatus is described for detecting the presence of a gaseous chemical produced during a chemical-mechanical polishing operation. The apparatus includes a catalytic converter, a reaction chamber and a light sensor. The catalytic converter, heated to about 800.degree. C. converts the chemical to a different chemical product. The reaction chamber produces an excited species; the pressure in the reaction chamber is maintained sufficiently low to substantially avoid collisional deactivation of the excited species, so as to permit real-time detection of the chemical. A light signal from the excited species is input to the light sensor. An output from the light sensor corresponds to the real-time detection of the chemical, thereby permitting real-time control of the chemical-mechanical polishing operation.
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