Optical film material especially TiO2 or Ta2O5 optical waveguide layer and method for producing such
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United States of America Patent
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Jan 14, 2003
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N/A
app pub date -
Aug 26, 1996
filing date -
Apr 1, 1993
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Expired
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Abstract
A method for producing a layer of a metal oxide with optical losses of 15 dB/cm, at most, for light with a wavelength of 633 nm, includes depositing the layer using magnetic field enhanced reactive DC-sputtering, from a metallic target.
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