Method and apparatus for controlling the taper angle of the walls of laser machined features
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United States of America Patent
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Dec 31, 2002
Grant Date -
N/A
app pub date -
Apr 6, 2000
filing date -
Apr 6, 2000
priority date (Note) -
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Abstract
A new method and apparatus for moving an excimer laser beam relative to a workpiece to control the wall profile of laser machined features, such as holes and grooves. An excimer laser beam is displaced relative to a workpiece in a substantially circular motion and the substantially circular motion is further displaced relative to the workpiece to correspond to a desired shape.
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