Importance

Loading Importance Indicators...

Abstract

A micromachined plate 11, called a torsion plate, selectively pivots upon a substrate responsively to electrical force so as to move an attached micromirror 12 in a same plane; thereby to accurately selectively intercept, and to reflect, a light beam 2 that is moving parallel to the substrate; forming thus an optomechanical switch 1. The electrical force may be electromagnetic 3 in nature or, preferably, electrostatic. In various embodiments the pivoting torsion plate 11 with the micromirror 12 affixed may be (i) biased off the substrate by a three-dimensional structure 14 and/or by a 'reshaped' torsion beam 11c, (ii) bent as plate 11d, and operated push OR pull, push AND pull, or push AND push, in a rocking operation, (iii) elevated above the substrate upon a self-assembling 'micro-elevator structure' 16, and/or (iv) moved greatly in angular position by action of a 'micro-flap' 11f. A new design spring-loaded landing electrode 18, and a torsion microhinge 131-134, further enhance performance. The micromachined, or Micro Electro Mechanical Systems (MEMS), optomechanical switch 1 so formed is both fast and accurate to switch light over large angles up to 180.degree. while being highly resistant to sticking, or 'stiction'.

Loading the Abstract Image...

First Claim