Photolithographic process for the formation of a one-piece needle
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United States of America Patent
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Dec 24, 2002
Grant Date -
N/A
app pub date -
Jun 29, 2000
filing date -
Jun 29, 2000
priority date (Note) -
Expired
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Abstract
A method and an apparatus is disclosed for forming a one-piece introducer needle having a member portion and a needle portion by introducing a photoresist on a substrate. The temperature of the substrate is increased and then decreased. A photomask is deposited onto a substrate.
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