Flatness measuring equipment
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United States of America Patent
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Dec 24, 2002
Grant Date -
N/A
app pub date -
Mar 2, 2000
filing date -
Mar 10, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
The flatness measuring equipment can highly precisely measure flatness of a surface of a large-sized planar member, e.g., an abrasive plate. In the equipment, an elongated member is provided above and parallel to the surface of the planar member to be measured. A movable member is provided to the elongated member and capable of moving along the elongated member. A distance sensor, which is provided to the movable member, measures distance between the movable member and the surface of the planar member. A laser beam source emits a laser beam, at a fixed level, toward the movable member. A light receiving sensor detects a variation of a level of the movable member with respect of the fixed level of the laser beam.
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