Micro-mechanical actuator including auxiliary lever to enlarge travel range of actuated object
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United States of America Patent
Stats
-
Dec 17, 2002
Grant Date -
Jul 4, 2002
app pub date -
Apr 27, 2001
filing date -
Jan 2, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-mechanical actuator is disclosed for actuating an object in a micro-electro-mechanical system. One end of the object is flexibly connected a substrate, and another end is flexibly connected to an auxiliary lever which is further connected to an actuating force generator. The auxiliary lever receives an actuating force generated from the actuating force generator to perform a levering operation about a fulcrum. The position of the fulcrum allows an portion of the auxiliary lever connected to the object has a shift larger than a shift of another portion of the auxiliary lever connected to the actuating force generator in response to the actuating force.
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